Abstract
We present experimental results describing the activation process of Ti–Zr films, one promising member from a family of non-evaporable getters (NEG), grown ex situ by sputter-deposition. An activation process of the Ti–Zr thin films was studied by X-ray induced photoelectron spectroscopy (XPS) and by measurements of ultraviolet induced photoelectron yield. The former method provides valuable information about a composition and chemical bonding among atoms found in a surface region (4–6 nm) of a given sample and their changes during the activation process. The latter method provides information about a total photoelectron current induced by monochromatized He II irradiation (40.2 eV), useful for a proposed particle accelerator.
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