Abstract
Measurements of X-ray spectra from ECR plasmas of the 7.25 GHz ECR ion source of the FZ Rossendorf and the very first measurements of the 14.5 GHz ECR ion source of the TU Dresden are presented. The measurements have been accomplished using energy dispersive and wavelength dispersive X-ray spectrometers. It is shown that X-ray spectroscopy is suitable for providing source diagnostics to determine electron energy distribution functions, ion densities, ion charge state distributions and other source parameters.
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