Abstract
The analytical techniques based on excitation of inner-shell electrons by an incident X-ray photon beam suffer generally from their poor degree of lateral localization. Nevertheless it is possible to perform the microanalysis of a sample in the forms of a thin film by: (i) X-ray photoelectron spectroscopy (XPS or ESCA) and X-ray-induced Auger electron spectroscopy (XAES) for surface analysis; (ii) X-ray absorption spectroscopy (XAS) and X-ray microfluorescence spectroscopy (XMS) for bulk analysis. The corresponding images can also be obtained in the scanning mode: scanning X-ray photoelectron microscopy (SXPM), scanning X-ray-induced Auger electron microscopy (SXAEM) and scanning X-ray microradiography (SXM). The experimental arrangement and the results obtained are described here, together with further improvements and comparisons with other technical solutions.
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