Abstract

The growth quality and structure parameters of (AlP)n/(GaP)n short-period superlattices (n = 4,6) grown by MOVPE using TMGa, TMAl and PH3 were measured by x-ray double crystal diffraction. Based on this, Raman spectra of the samples were measured and analysed and they were studied by comparing with the Raman spectra of a GaP single crystal. For the samples, the double-phonon modes of the first-order Raman scattering all exist. Moreover, the second-order Raman scattering peaks are observed to exist.

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