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Abstract
Abstract The effect of nitrogen content on the microstructure of chromium-based coatings deposited by r.f. magnetron sputtering was studied using various X-ray diffraction techniques. Cr, Cr 2 N and CrN were the major phases identified, respectively, for 5, 34 and 50 at.% by recording θ /2 θ and glancing incidence (1°) scans. Between these well- identified crystallographic structures, we have noted a peak broadening with poor intensities that could be interpreted as mixtures of Cr, Cr 2 N and/or Cr(N) phases. The influence of nitrogen on the preferred crystal orientation of the films was investigated. Highly textured Cr(110) and CrN (111) were evidenced, and texture was found to be a function of nitrogen content in the sputtering atmosphere. Finally, the Langford method was applied for line profile analyses leading to results concerning crystallite sizes and strains.
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