Abstract
X-ray diffraction analysis was employed for the investigation of the structural imperfections of a sputter deposited TiO 2/Ti 3Al bilayer: The spatial distribution of crystallite size, microstrain and crystal orientation, as well as the strain-free lattice parameters, residual stresses and the Debye–Waller factor, were determined. The TiO 2 sublayer is largely amorphous. The Ti 3Al sublayer is polycrystalline and exhibits a pronouncedly anisotropic microstructure: It consists of columnar, needle-shaped crystallites with the crystal lattice c-axis as needle axis. The microstrain of the Ti 3Al-layer increases upon changing the viewing (diffraction vector) direction from vertical to parallel to the layer surface. The Ti 3Al layer is subjected to a large compressive macrostress parallel to the surface. The Debye–Waller parameter as determined for the Ti 3Al sublayer is larger than that of a reference Ti 3Al specimen. The investigations were complemented by transmission electron microscopy and energy-dispersive X-ray spectroscopy.
Published Version
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