Abstract
X-ray emission spectroscopy using focused electron beams to excite thin specimens provides elemental analysis with very high spatial resolution. The lithium-drifted silicon energy-dispersive spectrometer (EDS) is the only X-ray detector widely used in the analytical electron microscope (AEM). Future AEMs may employ an intrinsic germanium EDS detector to detect heavy-element K lines in addition to a Si(Li) detector optimized to detect the light elements such as O, N, C, B and possibly Be. The advantages of the wavelength-dispersive crystal spectrometer (WDS) complement those of EDS detectors and may be useful in an AEM optimized for high-spatial-resolution X-ray emission spectroscopy.
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