Abstract
AbstractIn this paper, a WR‐1.5 band (500–750 GHz) 3rd order waveguide bandpass filter has been designed and fabricated using high precision computer numerically controlled metal micromachining. The filter has been measured with a 7.29% (48.7 GHz) bandwidth at the center frequency of 667.5 GHz. The minimum passband insertion loss is measured to be 0.87 dB and the measured return loss is better than 10 dB across the whole passband. A yield percentage is analysed and estimated based on the fabrication tolerance.
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