Abstract
This communication investigates the role of uniform and non-uniform cantilever structures in the design of DC contact RF MEMS switches. The Eigen frequency exploration is performed. The cantilever structure is offering low actuation voltage. Because of multiple contacts, the switch reliability if improved significantly. The height of the cantilever is 1.5 µm and actuation voltage is 5.5 V. The designed DC contact RF MEMS switch is analyzed over the frequency range 0.5–10 GHz. The insertion loss of the switch is −0.2 dB and the isolation loss of the switch is −41 dB to −20 dB. The simulation level switch performance is analyzed using COMSOL and HFSS FEM tools.
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