Wire electrochemical micromachining of high-quality pure-nickel microstructures focusing on different machining indicators

Abstract

High-quality pure-nickel microstructures, which are characterized with multiple superior machining indicators, including machining homogeneity, machining surface roughness, and machining round edge, are now highly anticipated in the field of micromachines and microsystems. However, according to the published studies, a gap remains in achieving high-quality machining. In this paper, wire electrochemical micromachining (WECMM) is proposed for machining high-quality pure-nickel microstructures focusing on different machining indicators. The appropriate electrolyte is selected by combining analysis of the electrochemical characteristics and machining experiments involving microslits of pure nickel. In contrast with previous studies that usually focused on the machining homogeneity or machining surface roughness of the machining results, the effects of several critical machining parameters on the machining homogeneity, machining surface roughness, and machining rounded edge are studied comprehensively, and the relative results for different machining indicators are also revealed. Finally, the combinations of process parameters for manufacturing high-quality pure-nickel microstructures focusing on different machining indicators are identified, and corresponding high-quality pure-nickel microstructures are fabricated.