Abstract

Wien filter is suitable for the separation of the primary and the signal electron beams in very low energy scanning electron microscope with cathode lens [1]. We have modified the two-grid shadow method [2] to determine experimentally electron optical properties (cardinal elements and aberrations) of the Wien filter, which is not a rotationally symmetric element. We call the modified method the shadow method with grid and moving screen. The advantage of the shadow method is its geometrical simplicity allowing the comparison of the experimentally obtained and numerically computed trajectories.

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