Abstract
This paper reports a novel micro-fluxgate sensor based on a double-layer magnetic core of a Fe–Co–B-based amorphous ribbon. The melt-spinning technique was carried out to obtain a Fe–Co–B-based amorphous ribbon composite of Fe58.1Co24.9B16Si1, and the obtained amorphous ribbon was then annealed at 595 K for 1 h to benefit soft magnetic properties. The prepared ribbon showed excellent soft magnetic behavior with a high saturated magnetic intensity (Bs) of 1.74 T and a coercivity (Hc) of less than 0.2 Oe. Afterward, a micro-fluxgate sensor based on the prepared amorphous ribbon was fabricated via microelectromechanical systems (MEMS) technology combined with chemical wet etching. The resulting sensor exhibited a sensitivity of 1985 V/T, a wide linearity range of ±1.05 mT, and a perming error below 0.4 μT under optimal operating conditions with an excitation current amplitude of 70 mA at 500 kHz frequency. The minimum magnetic field noise was about 36 pT/Hz1/2 at 1 Hz under the same excitation conditions; a superior resolution of 5 nT was also achieved in the fabricated sensor. To the best of our knowledge, a compact micro-fluxgate sensor with such a high-resolution capability has not been reported elsewhere. The microsensor presented here with such improved characteristics may considerably enhance the development of micro-fluxgate sensors.
Highlights
Magnetism detection and measurement have been an essential function in many application fields for years [1]
Micro-fluxgate sensors fabricated by complementary metal–oxide–semiconductor (CMOS) and microelectromechanical system (MEMS) technology show great potential in many application fields such as parallel robot applications [9], small satellite positioning [10], portable global positioning system (GPS) positioning equipment [11], detection of biomagnetic nanoparticles [12], and global navigation satellite systems [13] because of their small size, light weight, good integration of signal processing circuits, and so on
A micro-fluxgate sensor based on the prepared amorphous ribbon was fabricated via MEMS technology combined with chemical wet etching
Summary
Magnetism detection and measurement have been an essential function in many application fields for years [1]. Micro-fluxgate sensors fabricated by CMOS and MEMS technology show great potential in many application fields such as parallel robot applications [9], small satellite positioning [10], portable global positioning system (GPS) positioning equipment [11], detection of biomagnetic nanoparticles [12], and global navigation satellite systems [13] because of their small size, light weight, good integration of signal processing circuits, and so on. Because of its poor high-frequency performance and relatively low saturation induction density, permalloy is far from being satisfactory as the magnetic core material of micro-fluxgate sensors, which are needed in order to meet urgent demand for the development of information technology and portable electronic equipment. In order to facilitate the uninterrupted development of fluxgate sensors toward wider measuring ranges and higher sensitivities, magnetic core materials with better magnetic performance are needed
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
