Abstract
In order to eliminate polyurethane hat resonance frequency intervention and reduce fluid influence, a whisker-inspired MEMS vector hydrophone (WIVH) encapsulated with parylene is proposed to broaden frequency bandwidth and improve sensitivity-frequency response performance, compared to the lateral line-inspired MEMS vector hydrophone (LLIVH). Parylene that is conformally deposited on the device surface replaces polyurethane encapsulating hat and silicone oil existing in current encapsulation technology. The main advantage of WIVH as demonstrated by modelling and characterization is the enhanced bandwidth response, which is the critical factor in hydrophone design. Acoustic pressure gradient properties of the WIVH and LLIVH are analyzed to demonstrate the influence of the polyurethane hat. The interactions of the parylene membrane with fluid and the influences on vibrating performance are also investigated. Resonance measurement and sensitivity-frequency response analysis demonstrate the frequency bandwidth of the WIVH could be extended twice compared to that of the LLIVH. Moreover, the WIVH is proved to act as a typical pressure gradient hydrophone with an increment of 6 dB per octave in the linear region.
Published Version
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