Abstract
Scattering S-parameter measurements of Cu/porous methylsilsesquioxane (pMSQ) damascene interconnects with widths from 0.15 μm to 4 μm have been measured up to 40 GHz. For the narrowest conductors, the quasi-transverse electromagnetic mode is attained only at high frequencies. The effect of Cu conductor width on both dc and ac resistivity is also determined.
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