Abstract
In contrast to the general view that the broad modulation in the reflectivity curve of multilayers is correlated to the oxide cap layer, we show that it is usually the buffer layer that cause the broad modulation in x-ray reflectivity curve. The buffer layer thickness can be exactly and directly determined from the broad modulation by a modified Bragg’s law. Furthermore, we theoretically analyze the effect of the cap layer on the broad modulation.
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