Abstract

This chapter presents the development of a web enabled database system for MEMS design and manufacturing which can provide for the networked design and manufacturing services over the Internet. Specifically, the data obtained from various sources for MEMS manufacturing processes/materials are organised as databases by using the relational database management systems (RDBMS), Microsoft Access and MySQL. The database system can be accessed from a Java application as well as an applet. The stand-alone Java application is created using JFC Swing, JDBC and SQL, and the Java applet is subsequently created to enable web functionality. The underlying database is extensible through a set of administrator tools, or via the Web, which gives commercial design and manufacturing facilities the ability to update their own materials, processes and rules. This plays a crucial role in the system for advisory MEMS manufacturing service and concurrent collaborative MEMS design and simulation. The developed database system, which contains a most extensive manufacturing or fabrication processes and materials database for MEMS and microelectronics, is incorporated as a sub-system into both the standalone and the web-enabled MEMS design systems, MEMS Designer, which is being developed. The database system can be also updated to create a comprehensive data warehouse and an advisory system for MEMS manufacturing processes/materials selection.

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