Abstract
The nitrides and borides of titanium are well known for their high hardness and excellent corrosion and wear resistance in many tribological systems. Titanium boronitrides are expected to combine the advantages of both binary layers and allow optimization for the demands of each specific application. This study focuses on the influence of the process gas composition as well as the plasma parameters on the properties of PACVD coatings within the system Ti–B–N. The stoichiometry can be controlled by the process-gas composition. The layer growth rate increases with increasing N2 flow. For a fixed gas composition, it can be related to the supply of active layer-forming species. A high layer hardness is obtained at high ion energies and increases with decreasing N2 flow. At a constant N2 flow, layers with low boron contents reach a hardness of up to 4000 HK0.005, whereas Ti(B,N) with B concentrations above 20 at.% exhibits a lower hardness than that of TiN.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
