Abstract
A study has been made of the correlation between the wear and crystalline structure of ion-bombarded glass-like carbon. Glass-like carbon plates were bombarded with He, C, N, O, Ne and Ar ions at fluences ranging from 1 × 10 16 to 5 × 10 17 ions cm −2 at energies of 75 and 150 keV. The target temperatures during ion bombardment were room temperature and 200°C. Wear tests were carried out with a system of carbon sheets and a polishing silk disk on which water including diamond slurry was poured, using a conventional polishing machine. The structures of the ion-bombarded surface layers were investigated by means of laser Raman spectroscopy. It is found that most ion bombardments at room temperature improve the wear resistance of glass-like carbon, but ion bombardments at 200°C have little effect. O or Ne bombardment with 1 × 10 16 ions cm −2 is more effective than He bombardment with 5 × 10 17 ions cm −2. The Raman spectra show that the structure of ion-bombarded layers becomes more amorphous like as the mass and the fluence of ions are increased. In conclusion, ion bombardments produce an amorphous-like structure which improves the wear resistance; the degree of the improvement is determined by the amorphous-like structure and its thickness.
Published Version
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