Abstract
The wear properties of δ-(Ti,Mo)N films deposited at low and high nitrogen gas flow rates (fN2) were investigated. The film at fN2=2.0sccm showed better adhesive wear resistance than that at fN2=0.3sccm. Such improvement in the film at fN2=2.0sccm was due to the formation of Mo oxide debris by wear oxidation. It was found that Mo oxidation more easily occurred in the film at fN2=2.0sccm than in the film at fN2=0.3sccm. Thermodynamic consideration indicated that since the activity of Ti in δ-(Ti,Mo)N decreases with increasing N content, Mo oxidation is promoted in the film at fN2=2.0sccm, which leads to better wear properties.
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