Abstract
Good-quality Raman spectra of thin Si(Ti)O2 planar optical waveguides are reported. The exciting light was coupled into the waveguides via a grating coupler. The Raman signal from the films could be successfully discriminated from that of the glass substrate on which the waveguiding films were deposited. Sol–gel waveguides pyrolysed at 500°C and sputtered waveguides annealed at 500°C were found to have similar spectra. From their analysis it was concluded that TiO2 is present as anatase with almost the same degree of microcrystallinity in both types of film.
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