Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation (Small 22/2023)

Abstract

Porous Silica In article number 2206842, Stella Gries, Patrick Huber, and co-workers present a novel approach based on silver nanoparticle-assisted chemical etching (MACE) of macroporous silicon for the synthesis of hierarchically porous silicon. The MACE process is mainly guided by a metal-catalyzed redox-reaction where silver nanoparticles drill mesopores into the silicon scaffold structure. The resulting porous silicon can be transformed structure-conserving by thermal oxidation to hierarchically porous silica glass.