VUV photoionization time-of-flight mass spectrometry of flash pyrolysis of silane and disilane

Abstract

Flash pyrolysis of silane, SiH 4, and disilane, Si 2H 6, diluted in He or Ar (1%), was carried out at temperatures ranging from ∼700 to ∼1500 K. After a short reaction time of ∼20 μs, the initial products were isolated in a supersonic molecular beam and detected by single vacuum ultra-violet (VUV) photon ( λ=118 or 121 nm ) ionization time-of-flight mass spectrometry (TOFMS). Initial decomposition and reaction products, both free radical intermediates and stable species, were directly observed, which included SiH 2 and Si 2H 4.