Surface analysis system by VUV photons-stimulated desorption

Abstract

We developed a novel surface analysis system using a vacuum ultraviolet (VUV) photons. When the VUV photons were irradiated on the material surface, surface desorption was stimulated. The desorbed species were analyzed by the mass analyzer. First, we studied the decomposition process excited by VUV excimer lamps. We found that the different photon energy resulted in the different time dependence of the fragment detection even if the contamination had similar chemical construction. It suggested that the tracing the decomposition process We developed an analyzing system, called “photo-stimulated desorption mass spectrometer (PSD)”. A broadband VUV radiation for surface desorption was obtained from the Ar plasma excited by a Q-SW Nd:YAG laser. We selected and scanned wavelength by a monochromator. The desorbed species were analyzed by the quadrupole mass analyzer. We scanned the VUV wavelength and obtained the mass data. This PSD system enables us to analyze without damage on the sample.We developed a novel surface analysis system using a vacuum ultraviolet (VUV) photons. When the VUV photons were irradiated on the material surface, surface desorption was stimulated. The desorbed species were analyzed by the mass analyzer. First, we studied the decomposition process excited by VUV excimer lamps. We found that the different photon energy resulted in the different time dependence of the fragment detection even if the contamination had similar chemical construction. It suggested that the tracing the decomposition process We developed an analyzing system, called “photo-stimulated desorption mass spectrometer (PSD)”. A broadband VUV radiation for surface desorption was obtained from the Ar plasma excited by a Q-SW Nd:YAG laser. We selected and scanned wavelength by a monochromator. The desorbed species were analyzed by the quadrupole mass analyzer. We scanned the VUV wavelength and obtained the mass data. This PSD system enables us to analyze without damage on the sample.