Volume and surface rf power absorption in a helicon plasma source

Abstract

We consider the excitation and absorption of waves in a plasma cavity with parameters typical for helicon sources. rf power is shown to be transferred into the plasma via two channels. The first is realized by weakly damping helicon waves which are excited directly by the azimuthal parts of the antenna and penetrate into the bulk plasma. Electrostatic waves arising at a plasma edge owing to the linear mode conversion form the second channel. Strongly damped electrostatic waves can reach a plasma core at low magnetic fields only, while at high fields they deposit energy at the periphery of the plasma column. A principal fraction of the rf power is transferred into the plasma via the electrostatic channel, and so the power input turns out to be volume at low magnetic fields and surface at high fields. An enhanced volume input is possible at high fields in special anti-resonance regimes when the excitation of the electrostatic wave is suppressed. The effective collision frequency is introduced to describe effective damping of helicon waves arising due to their conversion into electrostatic waves. The results obtained permit explanation of both measured field profiles and the high absorption efficiency in helicon sources.