Abstract
The time-of-flight (TOF) electron spectrometer measures the time taken for a short pulse of secondary electrons to travel from the specimen surface to a fast microchannel plate detector placed some way up the electron-optical column. The shape of the resulting pulse is directly related to the complete energy spectrum of the emitted secondary electrons. Results are presented for an experimental set-up based on a standard scanning electron microscope column with an additional “single-pole” final lens which allows a relatively large unobstructed working distance above the specimen. Methods for the rapid extraction of quantitative voltage data are described.
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