Abstract
A scanning force microscope can be used to measure a device’s internal electrical potential with high spatial and temporal resolution. We present experimental results taken with a scanning force tester constructed in our lab that offers nanometer spatial resolution and gigahertz measurement bandwidth. The results are comparable to network analyzer results.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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