Abstract
For chemical vapor deposition, in which vapors of metallic organic compounds are introduced and decomposed over a substrate to form thin films, data on the volatility of the compounds are of essential importance as basic data. Thermal analysis is a useful tool for observing volatility. The application of thermal analysis, and the results for metal β-diketonates with respect to chemical vapor deposition of oxide superconductors are summarized. Problems to be solved are also pointed out.
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