Abstract
We present a two-dimensional (2D) imaging of electric current flow in nanoscale range obtained for planar structures. Experiments were performed at current densities of 10 5 -10 6 A/cm 2 for ∼ 1-μm-wide current-carrying metal- lic stripe. The images were obtained by use of magnetic force microscopy (MFM) as a sensor to measure a mag- netic response of current flow. The 2D current mapping was reconstructed from MFM phase images by numerical inver- sion of Biot-Savart law. By using such method, we obtained the parallel and perpendicular components of the current as well as module of total current with the spatial resolu- tion better than 100 nm. We clearly observed the changes of X and Y components of current density related to changes in the cross-section or form of the structures. Developed magneto-transport techniques can be used for detection and control of the current flow in real nano-electronic devices for studying of defects of current paths in nano-stripes due to, for example, electromigration processes and in other applications.
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