Visual Servo Control for Workspace Navigation of Nanorobot End-Effector Inside SEM

Abstract

Despite of the promising advancements in the last decade, the majority of scanning electron microscope (SEM)-based nanomanipulation tasks remain manually performed. Even in automated tasks, human intervention is required, at least during the task preparatory stage, where both the object of interest and robot end-effector are adequately enclosed in the field of view (FOV) of SEM at moderate magnification. This paper proposes a fully automated visual servo control method for workspace navigation of nanorobot end-effector that actively maintains the end-effector position offset from the center of FOV during passive working scene zooming and translation operations. We also propose using the scaling image Jacobian matrix theory to adaptively establish the hand-eye relationship of the nanorobotic system at uncalibrated magnifications, without the need for hardware regulation. This proposed method for workspace navigation is applicable to almost all commercial nanomanipulation systems. To the authors’ best knowledge, there has been no dedicated research on this problem in the literature. Experiments show that the proposed method significantly improves workspace navigation efficiency by about two-thirds, even for a skilled operator. <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Note to Practitioners</i> —Workspace navigation refers to the process of moving the FOV to visually enclose the object or feature of interest at a moderate magnification, which is prerequisite for initializing either an automated or manual nanomanipulation task. This process involves consecutive zooming of the SEM in and out, as well as translating the sample stage, which can cause the end-effector to move out of the FOV. Therefore, it is necessary to move the robot end-effector with visual assistance along workspace navigation to avoid unexpected collisions. Typically, skilled operators perform this process manually in almost all nanomanipulation tasks, which is tedious and time-consuming. Therefore, developing an automated visual servo control method for workspace navigation of end-effector will significantly contribute to the nanomanipulation community.