Abstract
The capacitance and voltage (C-V) characteristics of Metal-Oxide-silicon (MOS) capacitors passivated by CaF2B2O3-GeO2-SiO2 glasses with OH− ions, water and fluoride contents were investigated. As the OH− absorption coefficients of the glass increased, adverse effects on the recovery of hysteresis C-V curve shifts was observed. The content of OH− ions is closely related to the fluoride content in the CaF2 B2O3-GeO2-SiO2 glass. The viscous-flow point of the glass was lowered with increasing degree of ionic character obtained from Hannay's equation.
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