Abstract
One of the main challenging matters for micro/nano scale object manipulation is the micro/nano physical and chemical phenomenon which is still not completely understood. Therefore, it is very early for automatic manipulation systems, and teleoperation technology at the initial phase is a promising tool for understanding these uncertainties and improving automatic manipulation strategies using the human intelligence. Therefore, a teleoperation system with Virtual Reality (VR) user interface is proposed for micro/nano manipulation applications in this study. In the literature, two groups use teleoperation for micro/nano manipulation depending upon our larowledge. Hollis et al. [1] utilized STM probe as the slave-robot and 6DOF fine motion device called Magic Wrist as the master device for feeling atomic scale topography in operator's hand. They tried to feel the topology of gold and graphite, but there were problems of mechanical and electrical noise which deforms the tactile feeling, and no true force-reflecting behaviour. Another group [2] utilizes commercial Atomic Force Microscope (AFM) and haptic device for real-time haptic display, but they do not have any report on teleoperation control problem.
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