Vibration Energy Harvester with Bi-stable Curved Beam Spring Offset by Gravitational Acceleration

Abstract

We developed MEMS bi-stable spring for vibration energy harvester (VEH), which consists of intrinsically curved shape spring and gravitational acceleration. By applying the gravitational acceleration, the curved beam is offset to the gravity direction. It will make more symmetrical bi-stable motion and the symmetry is improved from 3.3 to 65.4%. We proposed that the combination between curved beam and gravity acceleration for decreasing snap- through acceleration. From the analytical result, we investigate the combination can effective to use for decreasing of snap-through force. We also fabricated the prototype device by using MEMS fabrication process. The frequency response for horizontal direction and the acceleration response for vertical direction are measured. The acceleration response shows that the gravitational acceleration improves the symmetry of snap-through force.