Abstract
In this paper, we design a nonlinear resonant micro-gyroscope based on the blue-sideband parameter modulation (BSPM), and Coriolis force acts in the axial direction of the resonant beam in the form of a twice-frequency parameter excitation. Considering the geometrical nonlinearity of the micro-beam, the dynamic equations of the resonant beam are derived and discretized according to Hamilton principle and Galerkin method. The discretized equations are subjected to perturbation analysis by using the multi-scale method, and the quality factors of the resonant beams are calculated by the half-power bandwidth method. Moreover, the sensitivity of micro-gyroscope is characterized by the amplitude ratio changes before and after the bifurcation of the nonlinear resonant beam. We conducted a detailed study on the effects of Coriolis force dynamic input, and BSPM on the amplitude-frequency response of resonant beam and the sensitivity of micro-gyroscope. The results indicate that when Coriolis force acts on the resonant beam in the form of a twice-frequency parameter excitation, it not only causes the resonant frequency of the micro-beam to shift but also significantly increases the amplitude of the resonant beam. The addition of BSPM significantly improves the quality factor of the resonant beam and enhances the signal-to-noise ratio. Under nonlinear conditions, when the modulation voltage is sufficiently large, the amplitude-frequency response of resonant beam exhibits two unstable regions near the resonant frequency. Although BSPM reduces the amplitude ratio sensitivity, there is still a 60 times improvement over conventional frequency shift sensitivity. Furthermore, BSPM reduces the nonlinearity degree of the amplitude ratio sensitivity by 64%, which is important for the design and fabrication of high-sensitivity resonant micro-gyroscope.
Published Version
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