Abstract
The vibration characteristic analysis method for a quartz microgyroscope based on the admittance circle is reported in this paper. Admittance theory is introduced and the admittance circle principle is analysed to study the vibration characteristics of the quartz microgyroscope. The prototype gyroscope was fabricated by micro-electromechanical systems (MEMS) technology. The admittance and phase diagram of the work mode were obtained by vibration mode test systems. Then the admittance circle of the work mode was drawn, and the parameter identification of the transfer function between the voltage and current was completed to analyse the vibration characteristics. Therefore, the vibration characteristic analysis method based on the admittance circle can be used to build the transfer function of the quartz microgyroscope, which is helpful for the design of a high performance quartz microgyroscope.
Highlights
Gyroscopes can be used to measure the rotation angle, and they are widely used in military and civil areas.[1,2] The quartz microgyroscope is the most important gyroscope, and has the potential advantages of low cost, high stability and reliability.[3,4,5] The quartz microgyroscope is usually used to supply the attitude information for inertial navigation.[6]
The vibration characteristic analysis method based on the admittance circle can be used to build the transfer function of the quartz microgyroscope, which is helpful for the design of a high performance quartz microgyroscope
This paper focuses on the vibration characteristic analysis method based on the admittance circle to improve the performance of quartz microgyroscopes
Summary
Gyroscopes can be used to measure the rotation angle, and they are widely used in military and civil areas.[1,2] The quartz microgyroscope is the most important gyroscope, and has the potential advantages of low cost, high stability and reliability.[3,4,5] The quartz microgyroscope is usually used to supply the attitude information for inertial navigation.[6]. The equivalent method was introduced to the analysis process to solve the problem of the vibration characteristic analysis of the quartz microgyroscope. This paper focuses on the vibration characteristic analysis method based on the admittance circle to improve the performance of quartz microgyroscopes. The quartz microgyroscope based on the Coriolis force usually drives and senses the structure vibration by the piezoelectric effect. The drive beam and sense beam of the quartz microgyroscope may be equal to the piezoelectric vibrator device, so they could be described by the equivalent circuit method.[15]. The proposed analysis method is to use the admittance circle principle to realize the parameter identification of the transfer function between the voltage and the current. The transfer function between the voltage and the current was obtained to analyse the vibration characteristics. The vibration structure was that of the equivalent circuit instead, which is very convenient in designing test and control systems
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