Abstract
This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 microm, 90 microm and 110 microm) have been carried out for TE and TM polarizations at the wavelength of 1.3 microm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.
Highlights
In rib [1] and strip [2] waveguides, light is predominantly guided in the high index material
We experimentally demonstrate the first vertical multiple-slot waveguide using a silicon nitride / silicon oxide platform at a wavelength of about 1.3 μm for both quasiTE and quasi-TM light polarizations
The extinctions at resonance are larger than 6 dB and about 10 dB for the TE and TM polarizations, respectively
Summary
In rib [1] and strip [2] waveguides, light is predominantly guided in the high index material. The light has little interaction with the surrounding medium. This is a drawback for biosensing applications where small index variations of the surrounding medium are monitored. Slot waveguides present an interesting alternative [3]. In such a waveguide, light is confined in a low index slot region sandwiched between two high index rails. Due to the discontinuity of the electric field at the interface between the rails and slot, a significant fraction of the electromagnetic field is localized in the slot
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