Abstract
The performance of a length-measuring interferometer system designed to be insensitive to stray reflections and polarization effects resulting in a subnanometric measurement capability is described. Results from the mathematical analysis of the interferometer signals, which provided accurate fringe subdivision and allowed a 1σ of 0.15 nm to be realized from this system, are also described. The motion of a piezoelectric transducer (PZT) was characterized over a 1-μm range using the system, and the results were used to confirm this subnanometric measurement capability of the interferometer.
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