Abstract

SummaryPrevention of oil backflow in Roots pumps ‐ Residual gas analysis by quadrupole mass spectrometryIn industrial vacuum applications too, there is a growing trend towards dry, oil‐free, pump systems. But what does oil‐free mean? All bearings and gearboxes used in roots and screw pumps require lubrication with oil or grease. While constructive measures are implemented to avoid contamination of the process gas by back‐flowing lubricants from the pumps, no tests have yet been carried out on complete pumping stations to confirm their effectiveness. With the help of this report it is possible for the first time to make qualitative statements about the oil‐free nature of dry pumping stations.

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