Variations in the Probe Beam Broadening with Operating Conditions in ESEM: Monte-Carlo Simulations and Edx Measurements

Abstract

Abstract An understanding of the scattering of an electron beam as it passes through a volume of low pressure gas is of critical importance for users of Low Vacuum and Environmental Scanning Electron Microscopes (LV-SEM & ESEM respectively) The ‘skirting’ of the primary beam as a result of scattering is of particular importance in X-ray microanalysis where scattered electrons, falling onto the sample away from the probe beam, can adversely affect the spatial resolution of the X-ray signal. A number of studies have attempted to quantify the width of the probe beam experimentally and hence determine optimum microscope operating parameters. Theoretical and computational work modelling the interactions of the beam with the gas have suggested that the shape of the probe beam can be modelled by some form of Gaussian. Experimental measurements, however, suggest that the probe has a skirted form rather than a Gaussian one.