Abstract

AbstractNanoengineered polar oxide films have attracted much attention for electric energy storage thanks to their high energy density, though they are all deposited on thick and rigid substrates, resulting in inferior overall energy density and poor manufacturability. Herein, an alternative strategy is developed for oxide dielectrics utilizing van der Waals epitaxy on ultrathin and flexible mica substrate, with a dielectric superlattice of Pb0.92La0.08(Zr0.95Ti0.05)O3‐SrTiO3 carefully engineered to break its long‐range antiferroelectric polar order. An ultrathin flexible capacitor is obtained as a result, with a record high overall energy density of 12.19 J cm−3 and an efficiency of 90.98%, and there is much room for further improvement since mica substrate can approach 2D limit. The superlattice can be easily rolled for large‐scale manufacturing, and the energy storage performances are well maintained under large bending deformation as well as extended bending cycling. The study thus establishes a viable route for dielectric oxide films, paving way for their practical applications in high‐energy density capacitors.

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