Abstract
A control method is proposed in order to reduce the steady-state amplitude of a self-excited cantilever probe in atomic force microscopy. The control method induces van der Pol oscillation by applying both linear and nonlinear feedback. Oscillation of the controlled cantilever cannot easily be stopped, even with the modulation of the viscous damping effect in the measurement environment, because the self-excited oscillation is produced far from the Hopf bifurcation point by high-gain linear feedback. Also, high-gain nonlinear feedback realizes a low steady-state amplitude to enable noncontact measurement. Finally, the feasibility of the practical application of a van der Pol-type self-excited microcantilever probe to nanoscale imaging is examined.
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