Abstract
A highly versatile new ionization gauge, the IMG 300, has been introduced by Balzers High Vacuum Limited, Milton Keynes, to control and monitor vacuum installations and plasma and sputtering processes. In its basic configuration, the IMG 300 is a simple ionisation vacuum gauge which can be bench or rack mounted. When a high-pressure (HP) gauge head is fitted, the IMG 300 covers the l-10-6mbar range, while a Bayard- Alpert (BA) gauge head covers the measurement range from 10-2–10-9mbar. The high-pressure gauge head is immune from electric and magnetic interference often encountered in process plant.
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