Abstract
Ionization gauges with rapid response are developed to study the transient behavior of rarefied gas puffs injected from a fast acting gas valve. A standard densitometer is provided by detecting fluorescence signals in the puff stimulated by a 23 kV electron beam. It is found that a usual opened-6AH6 gauge is not available for a fast ionization gauge since disturbances caused by the gauge head itself in the puff flow give some unfavorable effects on measurements. Four simple-shaped gauge heads of different types are newly designed so that the gas puff may flow smoothly through them. A negative feedback loop is connected to the grid electrode to stabilize the electron current. The gauge head with three co-axial grid-like electrodes and a hair-pin filament in its center is found to record the behavior of puffs accurately in the pressure range from 10-3 to 1 Torr.
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