Abstract
AbstractThe tribological properties of Ti‐based (Ti, TiO2, and TiN) thin films on a stainless steel (304SS) substrate were investigated at several pressures in air. Films 0.2 μm thick were prepared on a mirror‐polished substrate using the methods of ion‐beam‐assisted deposition, ion‐beam‐assisted reactive deposition, and dynamic ion beam mixing. Tribological testing was carried out with a tribometer of a pin‐on‐disk type in a high‐vacuum chamber. The wear surface was observed with a scanning laser microscope and a scanning electron microscope.The friction coefficient of stainless steel at a pressure of 1 × 105 Pa was lower than that at 1 × 10−5 Pa, because oxygen or moisture in the air acted as lubricants. Also the TiN thin film prepared at 1 × 105 Pa showed a low friction coefficient until wear of the TiN layer on the substrate occurred at a sliding distance of 10 m. However, the friction coefficients of the TiO2 and Ti thin films were hardly dependent on the gas pressure. At a sliding distance of 5 m, the friction coefficients of Ti‐based thin films converged to 0.3 at a pressure of 1 × 10−3 Pa. © 2004 Wiley Periodicals, Inc. Electr Eng Jpn, 149(3): 1–7, 2004; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/eej.20020
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