Vacuum metallizing—Quality and productivity enhancements through in-line technology

Abstract

Preliminary experiments have shown that oxygen plasmas can be effectively used for lubricant oil removal from metal surfaces in a roll-to-roll process. A linear multichannel hollow cathode plasma source for oxygen plasma cleaning (etching) and surface modification has been developed. The source is a linear set of plasma torches coming out from all holes. The discharge is magnetically enhanced and directed toward the substrates. Using a set of such cathodes should allow oil removal from both sides of a metal roll in production.Hollow cathode plasma cleaning of metal strip can provide an economical, practical solution for in situ metal strip cleaning in vacuum when accompanied by a subsequent deposition or corrosion-inhibiting process. Multiple banks of hollow cathodes can be used for higher line speeds, and depending on allowable substrate temperature rise, these may be on both sides simultaneously in free span material.