Abstract
A linear multi-orifice hollow cathode oxygen plasma source has been developed for oil removal from moving metal surfaces. The source is a linear set of plasma jets created at each orifice by a magnetically enhanced and directed d.c. hollow cathode discharge. Vacuum and electrical characteristics of the source are presented and discussed. Substantial reduction of carbon-containing contamination on a metal surface after exposure to the oxygen plasma is demonstrated by using in situ XPS. The surface cleanliness of a metal sheet is evaluated by the contact angle with water. This angle is desired to be 10° or less. The contact angle dependence on plasma dose density is described for plasma atmospheres of O 2 and O 2 + CF 4 and two different aluminium foil thicknesses.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
