Abstract
A self-contained automated robotic factory (SCARF) is described. This includes a central chamber with various transfer and monitoring ports, a vacuum-compatible robot for wafer transfer, and a particle monitoring system, all under automation. The cylindrical coordinate SCARF vacuum-compatible robot is unique, due to its fully vacuum-compatible motors, closed-loop control and configuration which makes it an ideal central component for a self-contained manufacturing system. Color vision system for in-vacuum inspection and measurement which will be an integral part of SCARF is being developed. Details of the SCARF system and robot are discussed, as well as the key technical issues facing the development of self-contained manufacturing systems.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: IEEE Transactions on Components, Hybrids, and Manufacturing Technology
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
