Vacuum applications

Abstract

A hot refractory anode vacuum arc (HRAVA) starts as a cathodic arc, which heats and deposits cathodic material on the anode. When the anode is hot, all the deposited cathode material is re-evaporated from the anode, forming a radially expanding plasma with reduced macroparticle (MP) contamination. This paper reports on the deposition of Sn films using this radially expanding arc plasma. The HRAVA current was I = 60–175 A and the duration was up to 180 s. Two electrode pairs were used. (1) A water-cooled Sn cathode with a diameter of D = 60 mm was used with a W anode having a thickness of d = 10 mm, diameter D = 60 mm and separated from the cathode by gaps of h = 10 and 15 mm. (2) A water-cooled Sn cathode with D = 30 mm was used with either of two graphite anodes, with d = 9 or 15 mm, D = 32 mm and h = 10 mm. The cathodes were recessed behind a boron nitride shield. A mechanical shutter controlled the deposition onset and exposure duration (15 s) on glass substrates. The distance from the arc axis to the substrate (L) was 80, 110, or 125 mm. Film thickness was measured with a profilometer. MPs on the coating surface were examined by optical microscopy.With D = 60 mm cathodes, L = 125 mm, and I = 175 A, the deposition rate Vdep monotonically increased with time from 0.5 initially to 3.0 μm/min after 120 s. With the D = 30 mm cathode, L = 110 mm, I = 175 A and d = 9 mm, Vdep increased with time to a peak of 0.84 μm/min at 20 s, and then decreased to a steady state of 0.69 μm/min at 45 s. The peak was due to re-evaporation from the hot anode of cathodic material, including MPs, which were deposited initially on the cold anode. The MP flux density decreased with I from 2.5 at I = 80 A to about 1 mm− 2 s− 1 at I = 175 A in case of D = 30 mm, L = 110 mm, d = 9 mm.