Abstract
A novel type of micro power relay has been designed and fabricated using UV-LIGA technology. The relay is based on electrostatic actuation and SU-8 was used as a functional material. The unique character of this novel power relay is that other than a SU-8 structure used both as an electrical insulator and a mechanical connector, all other components are made of metal or alloys. Because UV-LIGA technology has the advantages of broad material selection and the capability of making high aspect ratio microstructures, the technology is best suited for fabricating microelectromechanical power relays. A multi-step, multi-layer UV-LIGA process has been successfully developed and a prototype relay has been successfully fabricated.
Published Version
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