UV LED Assisted Printing Platform for Fabrication of Micro-Scale Polymer Pillars

Abstract

Ultraviolet (UV) assisted printing has emerged as a promising additive manufacturing (AM) technology, which puts UV light sources with focused emission in high demand. Unfortunately, current ultraviolet light-emitting diodes (UV LEDs) are not able to provide adequately focused UV emission required for printing. Thus, a UV LED package with focused UV emission was proposed and fabricated using microelectromechanical system (MEMS) technology in this study. An optical model of the UV LED package with focused UV emission was developed. Based on the designed model, a silicon reflector stacked on another was achieved. By assembling the stacked silicon reflector and hemispherical quartz lenses, the UV LED package with focused UV emission was successfully achieved. A narrow beam with a beam angle of 16° between half maximum intensity was achieved, while the intensity at 0° was greater than 1000 mW/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> at the focal point. The UV LED curing system using two focused UV LED packages was successfully developed based on the optical simulation results. Polymer pillars were fabricated by instantaneous UV curing process with synchronized UV curable polymer jetting process in one shot, and micro-scale polymer pillars with a diameter of 20 μm were achieved. Thanks to the high intensity and focused UV emission, polymer pillars can be formed in as little as 100 ms. 13600 polymer pillars were printed on a silicon wafer with uniform diameter and geometry in a single dispensing cycle. The UV LED assisted printing platform was successfully demonstrated for fabrication of micro-scale 3D structures in a fast speed with smooth printing process.