UV Laser Photodissociation of Small Molecules on Solid Surfaces

Abstract

Publisher Summary This chapter discusses ultraviolet (UV) laser photodissociation of small molecules on solid surfaces using photofragment spectroscopy. It has been found that laser intensity is one of the important factors that control laser surface chemistry. At small laser intensity, molecules adsorbed on solid surfaces dissociate into atoms and radicals. Some of these atoms or radicals react with atoms of the solid substrates. At large laser intensity, atoms are photoablated from the solid surfaces to react with the molecules adsorbed or in the gas phase. The chapter describes the dynamical study of UV laser photodissociation of halogen or metal-containing molecules on solid surfaces, reactions of atoms generated in the photodissociation of an adsorbate with solid surfaces, and reactions of molecules in the gas phase with the photoelectrons or metal atoms generated on intense laser irradiation of solid surfaces. Laser surface chemistry has been used as a basis for many new methods in surface processing—for example, photochemical deposition of metals, and photochemical etching of solid substrates, which are potentially useful techniques for the microelectronics industry.